Scanning electron microscope Phenom XL
Instrument description:
Phenom XL provides detailed topography, material contrast and elemental composition analysis of dry, solid materials
Key features:
- Magnification up to 200,000×, maximum resolution up to 10 nm (dependent on sample type and sample preparation)
- Backscattered electron detector (BSD) for material contrast imaging
- Secondary electron detector (SED) for detailed imaging of sample topography
- Energy dispersive spectroscopy (EDS) capability for elemental composition analysis
- Maximum sample size 100 × 100 × 40 mm
- Sputter metal sputtering (Au/Pd mixture) capability
Accessories:
- SC7620 Mini Metal Sputter (Quorum Technologies), gold/palladium mixture plating
Location:
Ústav fyziky a materiálového inženýrství
Responsible person:
Name: doc. Ing. Antonín Minařík, Ph.D.
Tel.: + 420 576 031 711
Mobile: + 420 603 929 933
E-mail: minarik@utb.cz
Office: 439/U15